JPH0524005Y2 - - Google Patents
Info
- Publication number
- JPH0524005Y2 JPH0524005Y2 JP10592687U JP10592687U JPH0524005Y2 JP H0524005 Y2 JPH0524005 Y2 JP H0524005Y2 JP 10592687 U JP10592687 U JP 10592687U JP 10592687 U JP10592687 U JP 10592687U JP H0524005 Y2 JPH0524005 Y2 JP H0524005Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- displacement sensors
- pair
- thickness
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 65
- 238000006073 displacement reaction Methods 0.000 claims description 28
- 238000005259 measurement Methods 0.000 claims description 28
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10592687U JPH0524005Y2 (en]) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10592687U JPH0524005Y2 (en]) | 1987-07-10 | 1987-07-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6410610U JPS6410610U (en]) | 1989-01-20 |
| JPH0524005Y2 true JPH0524005Y2 (en]) | 1993-06-18 |
Family
ID=31338977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10592687U Expired - Lifetime JPH0524005Y2 (en]) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0524005Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2563589B2 (ja) * | 1989-06-28 | 1996-12-11 | 松下電子工業株式会社 | 異物検査装置 |
| JP6449000B2 (ja) * | 2014-11-27 | 2019-01-09 | 株式会社ディスコ | 厚さ測定器 |
-
1987
- 1987-07-10 JP JP10592687U patent/JPH0524005Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6410610U (en]) | 1989-01-20 |
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